国家/地区 中国（15） 美国（6） 日本（3） 世界知识产权组织（3） 韩国（2） 台湾（2）
IPC部 C（26）
IPC大类 C23（26）
IPC小类 C23C（26） H01L（7） C01B（5）
G01N（4） B32B（3） C30B（3）
H01J（3） B01J（2） C09K（2）
C22C（2） F16H（2）
IPC C23C016/27（26）
发明人 WANG B（4） LI H（3） TZENG Y（3）
CHANG C（2） CHU W（2） JIANG N（2）
LI C（2） LI J（2） LI X（2）
SONG H（2） TZENG Y H（2） WANG S（2）
公开年 2021（10） 2022（5） 2016（2） 2017（2） 2020（2） 2023（2）
申请年 2021（8）  2020（5）  2017（3）  2022（3）  2019（2） 
专利权人 UNIV NAT CHE.（3） NINGBO HANGZ.（2） NINGBO INST .（2）

Microwave plasma chemical vapor deposition device, has metal cavity wall arranged around periphery of reaction cavity, where metal cavity wall is configured for shrinking or expanding around reaction cavity.

XU G, LIU F, WU H, AN K

Formation of graphene layer for semiconductor device, involves exposing substrate comprising conductive and dielectric materials to plasma to clean conductive material, and exposing substrate to another plasma to form graphene layer.

MEBARKI B, CHUA T C, VALENCIA C W, LEE J J, TANG X, CHEN X

Technology for preparing carbon-based material film based on common action of bias voltage and laser, comprises plasma chemical vapor deposition device based on adding bias and laser control.

ZHU J, WANG S, YANG D, DI M, WANG B

Preparing low friction metal/ultra-nano diamond complex coating in field of surface treatment of friction parts, comprises depositing ultra-nano diamond on surface of substrate to obtain ultra-nanocrystalline diamond coating, and using inert gas as protective gas.

NISHIMURA K, LI H, DENG L, CHU W, JIANG N, SONG H

Preparation of gallium nitride epitaxial structure by providing a silicon carbide substrate, pre-processing, growing a graphene film, growing diamond film, growing aluminum nitride polycrystalline film, and annealing.

PAN Y, FENG H, TANG J

Preparing diamond-multilayer graphene composite cathode material e.g. used in emission display, involves grinding silicon substrate in diamond powder uniformly and compactly, putting grinded silicon substrate into suspension liquid made of diamond powder.

LIU H, GUAN L, WANG B, ZHANG W, XIONG Y

Double-sided diamond-graphene film with double-sided structure, useful in an electrochemical biosensor, comprises a substrate, a doped diamond film, and a graphene film.

WANG B, TAN J, ZHOU K, SHI Z, SHI S, SHI Y, SHI H, WEI Q

Conductive self-lubricating composite coating comprises substrate, the surface of the substrate is sequentially composed of diamond-type layer, diamond-type carbon layer and graphene layer from inside to outside.

WANG B, LI H, YI J, YANG G, CHU W, JIANG N, SONG H

Continuous production apparatus of multiple types of carbon film, comprises reduction section for reducing substrate placed on belt conveyor, and raw material carbon source supply section that supplies raw material carbon source.

WATANABE J

Transistor pathogen virus detector for detection of SARS-COV2 virus, comprises substrate layer, silicon dioxide layer, nanocrystalline diamond layer, graphene oxide layer, fluorinated graphene oxide portions, and linker layer.

KOVI K K, SCHIRMANN E, KHAN A