国家/地区 韩国（3）
IPC部 C（3）
IPC大类 C23（3）
IPC小类 C23C（3）
IPC C23C016/40（3）
发明人
公开年 2022（2）
申请年
专利权人

Optical device comprises a substrate having multiple waveguides spaced apart from each other with a predetermined gap into a chamber, and depositing a metal oxide on each of the waveguide through an atomic layer deposition method.

HAN S, JAE P Y

Depositing thin film, comprises depositing graphene oxide film on first surface of substrate, and depositing first haze film on graphene oxide layer.

YOON S Y, YOOK J, JAI L H, SHIM W P

Method for directly synthesizing graphene on surface of target object, involves forming non-metal layer on support substrate, disposing target object in space above support substrate, and injecting carbon precursor to form graphene.

SONG Y, UDDIN M S, PARK J, PARKJAEHYUN