国家/地区 中国（3）
IPC部 C（3）
IPC大类 C23（3）
IPC小类 C23C（3）
IPC C25D001/10（3）
发明人
公开年 2021（2）
申请年 2021（2） 
专利权人

Method for preparing composite mask plate in electronic device processing field, involves setting photo-etching pattern on mask plate, removing part of photoresist, removing remaining photoresist with cleaning solution, cleaning laser opening residue, and drying mask plate to finish preparation.

CAI J, JIANG C, ZHUANG M, WU J, ZHAO W, YAO Q

Preparing ultra-thin radiating fin used in electronic device, and integrated circuit , involves preparing metal radiating sheet with array pattern on surface of metal foil by nanometre stamping template, and depositing vertical graphene film array on surface.

PAN Z, TAN H

Manufacturing mask plate in display device, comprises forming multiple mutually independent grooves on conductive substrate, electrifying, ultrasonically dispersing graphene coating in dispersing agent and stripping mask plate main body.

GUAN X, BAI S, BI N, LIU J, WU S