国家/地区 美国（2）
IPC部 C（4）
IPC大类 C01（4）
IPC小类 C01B（4）
IPC C01B032/194（4）
发明人
公开年 2021（3）
申请年 2020（4）
专利权人

Producing vertically aligned multilayer graphene sheets comprises placing substrate in alumina crucible having fixed amount of oil, where oil is edible or non-edible oil.

GHAI V, CHAWLA S, AGNIHOTRI P K

Directly growing multilayer graphene used in a pellicle for extreme ultraviolet lithography, involves forming small-layer graphene on SiN substrate, forming metal catalyst layer on small-layer graphene, and forming an amorphous carbon layer.

KIMHYUNGKEUN, MI K H, KIM H Y, LEE G H, SUNG K H, KIM H M, KIM S G, KIM H K

Performing graphene-enabled block copolymer lithography transfer to arbitrary substrate involves applying graphene on surface, adding block copolymers to graphene, and phase-separating block copolymers.

LEE W K, WHITENER K E

Processing the double-sided doping of single-layer graphene comprises e.g. using methane, hydrogen, and argon as gas sources in catalytic metals in a low-pressure CVD system growth of single-layer graphene film on the substrate.

LI D, CHEN Y, SUN X, JIA Y, JIANG K, SHI Z, ZANG X