国家/地区 日本（3） 韩国（3） 美国（2）
IPC部 B（3）
IPC大类 B01（3） C01（3） C23（2）
IPC小类 B01J（3）
IPC C01B032/182（3）
发明人 MATSUMOTO T（3） IFUKU R（2）
公开年
申请年
专利权人 TOKYO ELECTRON LTD（3）

Manufacture of graphene structure used for wiring, involves preparing substrate to be processed, and forming graphene structure on substrate surface by plasma chemical vapor deposition using plasma of process gas containing oxidizing gas.

RYOTA I, TAKASHI M, IFUKU R, MATSUMOTO T

Production of graphene used as wiring material, involves supplying carbon-containing gas and metal catalyst into chamber and reactivating catalyst by supplying process gas and carbon-containing gas to regrow graphene on catalyst surface.

IFUKU R, MATSUMOTO T

Graphene patterning method for forming graphene of predetermined pattern involves bringing a patterning member in which catalyst metal layer of predetermined pattern is formed into contact with substrate having graphene oxide film.

MATSUMOTO T, KASHIWAGI Y