国家/地区 美国（2）
IPC部 B（4）
IPC大类 B82（4）
IPC小类 B82Y（4）
IPC C23C016/26（4）
发明人
公开年 2022（2）
申请年 2021（4）
专利权人

Method of forming nano crystalline graphene, involves arranging substrate having pattern in reaction chamber, injecting reaction gas into reaction chamber, reaction gas including carbon source gas, inert gas, and hydrogen gas that are mixed, generating plasma of reaction gas in reaction chamber.

LEE C, JUNG A, SHIN H, SHIN K, SHIN K W, SHIN H J, JUNG A R, LEE C S

DIAMOND-LIKE FILMS BASED ON MODIFIED GRAPHENECAN BE USED TO PRODUCE WIDE-BAND FILMS OF NANOMETER THICKNESS FOR OPTICAL DEVICES.

CHERNOZATONSKII L A, DEMIN V A, KVASHNIN D G

Removing polymethylmethacrylate (PMMA) from graphene surface by subjecting PMMA layer to deep UV light irradiation, treating irradiated PMMA layer to remove PMMA layer and drying cleaned layer located on substrate in stream of nitrogen gas.

ALEXEEVA N, KASALYNAS I

Transparent electrode for photovoltaic cells, comprises transparent substrate and composite layer including graphene layer and nanoparticles that are embedded in graphene layer and extended through thickness of graphene layer.

ELSAYED K A M, MAAROUF A A