国家/地区 日本（3） 韩国（2） 美国（2） 世界知识产权组织（2）
IPC部 C（4）
IPC大类 C01（4）
IPC小类 C01B（4）
IPC C01B031/02（4）
发明人
公开年 2013（3）
申请年 2012（4）
专利权人

Graphene roll film has graphene film having wrinkle portion having specified width and central line average roughness, provided in base material.

YAMADA T, HASEGAWA M, TSUKAHARA N, SHIMADA N, YAZAWA K, KIM J H

Manufacture of graphene-like substance for electronic device involves heating substrate, introducing gas containing hydrocarbon, and forming graphene-like substance on substrate by plasma chemical vapor deposition method.

SUGITA H, KISHI N, SOGA T, JIMBO T

Pre-processing method of catalyst metal layer during formation of graphene, involves activating catalyst metal layer by applying plasma of process gas containing reducible gas and nitrogen-containing gas to catalyst metal layer.

MATSUMOTO TAKASHI, MATSUMOTO T

Making graphene film comprises providing copper foil, placing foil in microwave plasma chemical vapor deposition chamber, evacuating chamber, providing hydrogen gas to chamber, exposing foil to plasma, and providing methane gas to chamber.

FISHER T S, KUMAR A