国家/地区 韩国（3）
IPC部 B（3）
IPC大类 B01（3） C01（3） C23（3）
H05（2）
IPC小类 B01J（3）
IPC C23C016/511（3）
发明人 MATSUMOTO T（2）
公开年 2013（2）
申请年 2012（2） 
专利权人 TOKYO ELECTR.（2）

Manufacture of graphene structure used for wiring, involves preparing substrate to be processed, and forming graphene structure on substrate surface by plasma chemical vapor deposition using plasma of process gas containing oxidizing gas.

RYOTA I, TAKASHI M, IFUKU R, MATSUMOTO T

Pre-processing method of catalyst metal layer during formation of graphene, involves activating catalyst metal layer by applying plasma of process gas containing reducible gas and nitrogen-containing gas to catalyst metal layer.

MATSUMOTO TAKASHI, MATSUMOTO T

Making graphene film comprises providing copper foil, placing foil in microwave plasma chemical vapor deposition chamber, evacuating chamber, providing hydrogen gas to chamber, exposing foil to plasma, and providing methane gas to chamber.

FISHER T S, KUMAR A