国家/地区 韩国（2） 世界知识产权组织（2）
IPC部 C（3）
IPC大类 C01（3）
IPC小类 C01B（3）
IPC G03F001/62（3）
发明人
公开年 2023（3）
申请年 2022（2） 
专利权人

Pellicle used for reticle for extreme-UV exposure, comprises pellicle film through which extreme-UV rays transmit and support frame for supporting pellicle film, where pellicle film comprises multilayer thin film structure.

KIM Y H, KIMYONGHWAN

Pellicle for use in lithography mask assembly for extreme ultraviolet lithography process in semiconductor manufacturing industry to optically transfer patterns onto a substrate, comprises membrane that includes silicon carbide nanostructures with silicon carbide nanotubes.

ONEILL J, HART A H C

Pellicle used for exposure to extreme UV rays, comprises substrate having opening formed in central portion, etch stop layer formed on substrate to cover opening, and nanoporous graphene layer in which nanopores are formed on graphene layer, provided on etch stop layer.

KIMHYUNGKEUN, MI K H, KIM S K, JOJINWOO, KIM H Y