国家/地区 中国（5） 台湾（2） 美国（2）
IPC部 C（5）
IPC大类 C01（5）
IPC小类 C01B（5）
IPC C23C016/26（5）
发明人 ZHANG Z（5）
公开年 2013（2） 2015（2）
申请年
专利权人

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Preparation of graphene film on titanium or titanium alloy surface used as implant material, involves growing graphene film on metal base material, covering with plastic film, placing in dissolution medium, and attaching to titanium.

BI L, HAN Y, LI K, WANG C, ZHANG Z, YAN J, DIWU W

Preparing graphene thin films comprises processing copper foil blank and growing graphene films on copper foil where processing copper foil blank includes e.g. cleaning copper foil blank plasma, decontaminating and treating with oxide layer.

JIN H, LIU Z, QI X, PENG P, YANG H, ZHANG Z, ZHANG W, ZHANG X, DENG K

Positive pressure synthesis of graphene involves placing foil in reaction chamber, introducing anaerobic gas, cleaning, filling with oxygen-free gas to positive pressure, heating, feeding carbon-containing gas, cooling, and removing foil.

LV P, ZHANG Z

Method for forming e.g. multi-layered graphene layer deposited on glass substrate, involves utilizing microwave with electron cyclotron resonance mechanism to excite carbon-containing gas to deposit graphene layer on substrate.

HUANG K, CHANG C, HSIEH Y, CHIU P, MEDINA H, QIU B, XIE Y, ZHANG Z, MEDIONA H, HUANG K P, CHANG C C, HSIEH Y T, CHIU P W