国家/地区 中国（4）
IPC部 H（4）
IPC大类 H01（4）
IPC小类 H01J（4）
IPC H01J037/32（2） H01L021/67（2）
发明人 CHOI S M（2） CUI S（2） JANG D Y（2）
JEON M（2） JEON M S（2） JIN R（2）
JUNMINSUNG（2） KIM Y S（2） MIN C S（2）
ZHANG D（2）
公开年 2023（4）
申请年 2022（4）
专利权人 SEMES CO LTD（2）

Pressure difference diaphragm used for electron microscope, has graphene film that is set on diophragm sheet, and covers diophagm hole, and is used for preventing gas passing through and for electron beam to pass through.

NIE J, ZHENG Z, HAO H, CUI M, CAO G, MIAO L, XU J

Substrate treating apparatus for treating substrate using plasma, has chamber having treating space, support unit positioned within treating space and configured to support substrate, and plasma generation unit configured to generate plasma from process gas supplied to the treating space.

JANG D Y, CHOI S M, KIM Y S, JEON M S, JUNMINSUNG, MIN C S, ZHANG D, CUI S, JIN R, JEON M

Substrate treating apparatus, has plasma generation unit comprising bottom electrode and top electrode opposite bottom electrode, where top electrode comprises plate and electrode layer on plate.

JIN Y J, KIM J H, JANG D Y, CHOI S M, KIM Y S, JEON M S, JUNMINSUNG, MIN C S, YOUNGJO J, JIN Y, KIM J, ZHANG D, CUI S, JIN R, JEON M

Preparation method of graphene-based composite material involves using mixed gas of argon gas and hydrogen as carrier gas, and obtaining graphene-based composite material by chemical vapor deposition, where graphene material grows parallel to substrate in composite material.

WEI M, CHEN L, GUO X, ZHAO Y, LI X, ZENG F, TANG S, TANG Z