国家/地区 日本（3）
IPC部 B（3）
IPC大类 B01（3）
IPC小类 B01J（3）
IPC C01B031/02（3） C01B031/04（3） B01J037/02（2）
C23C016/02（2） C23C016/26（2） C23C016/513（2）
发明人
公开年 2013（3）
申请年
专利权人

Method for forming film of graphene involves placing substrate in processing chamber at reduced pressure, performing surface treatment process on portion of substrate, and providing carbon-containing material in processing chamber.

BOYD D A

Copper foil for manufacture of graphene for e.g. transparent electrode, conductive thin film of display element, mercury-free fluorescent lamp and carrier of drug delivery system, includes specified amount of preset plane on surface.

KOBIKI T, SAKAGUCHI K, KOHIKI M

Pre-processing method of catalyst metal layer during formation of graphene, involves activating catalyst metal layer by applying plasma of process gas containing reducible gas and nitrogen-containing gas to catalyst metal layer.

MATSUMOTO TAKASHI, MATSUMOTO T