国家/地区 China(3) Canada(2) Korea(2) Usa(2)
关键词 PLASMA ETCHING(14)
出版物 ACS APPLIED MATERIA.(2) NANO RESEARCH(2)
出版时间 2012(3) 2020(3) 2021(2)
机构 MCMASTER UNI.(2) STANFORD UNI.(2)
作者 DAI HJ(2) FANCHINI G(2) HILKE M(2) HUI LS(2)
JIAO LY(2) MUNIR M(2) TURAK A(2) VUONG A(2)
WONG V(2)

ACS APPLIED MATERIALS INTERFACES

HUI LS, MUNIR M, VUONG A, HILKE M, WONG V, FANCHINI G, SCHARBER MC, SARICIFTCI NS, TURAK A

ARABIAN JOURNAL FOR SCIENCE ENGINEERING

DUAN Y, YANG L, GAO JY, GUO SH, HOU M, HU T, QIU JJ

ECS JOURNAL OF SOLID STATE SCIENCE TECHNOLOGY

HUI LS, MUNIR M, WHITEWAY E, VUONG A, HILKE M, WONG V, FANCHINI G, TURAK A

SEMICONDUCTORS

VASILYEVA GY, SMIRNOV D, VASILYEV YB, GRESHNOV AA, HAUG RJ

NANOSCIENCE NANOTECHNOLOGY LETTERS

PARK S, SHEHZAD MA, CHOI W, KWON YH, EOM J, SEO Y

SMALL

GEORGE A, MATHEW S, VAN GASTEL R, NIJLAND M, GOPINADHAN K, BRINKS P, VENKATESAN T, TEN ELSHOF JE

NUCLEAR INSTRUMENTS METHODS IN PHYSICS RESEARCH SECTION BBEAM INTERACTIONS WITH MATERIALS ATOMS

NEUMANN PL, TOVARI E, CSONKA S, KAMARAS K, HORVATH ZE, BIRO LP

NANO RESEARCH

JIAO LY, ZHANG L, DING L, LIU JE, DAI HJ