国家/地区 中国（7）
IPC部 C（7）
IPC大类 C23（7）
IPC小类 C23C（7） C30B（2）
IPC C23C016/26（7）
发明人 DUAN Y（7）
公开年 2017（6）
申请年 2017（7）
专利权人 CHONGQING GR.（7）

Graphene growth device with high temperature process chamber, has high temperature process chamber and receiving cooling chamber guide roller that are finally wound onto graphene substrate receiving roller.

DUAN Y, HUANG D, LI X, LI Z, SHI H, WU J, YU J, ZHANG Y

Rolled graphene continuously growing device comprises discharging cooling cavity, vacuum pump, graphene growth substrate feeding roller, cooling zone guide roller, high temperature processing chamber, heater, and transition cavity.

DUAN Y, HUANG D, LI X, LI Z, SHI H, WU J, YU J, ZHANG Y

Multi-station graphene fast growing device comprises fixing platform, vacuum pump, gas conveying pipeline, heating device, graphene growth processing cavity, sealing flange, vacuumizing port, air inlet, vacuum pump, and mobile device.

DUAN Y, HUANG D, LI H, LI Z, SHI H, WANG Z, WU J, YU J, ZHANG Y

Heat insulation device of graphene thin film growing device, has upper uniform thermal baffle provided with ventilation hole, annular lug boss, inner ring, lower uniform thermal baffle, flange, rotating plate and rotating locking plate.

DUAN Y, HUANG D, LI X, LI Z, SHI H, WU J, YU J, ZHANG Y

Rolled graphene continuously growing device comprises a discharging cooling cavity, a cooling cavity and a vacuum pump for vacuumizing, where the discharging cooling cavity is provided with graphene growth substrate feeding roller.

DUAN Y, HUANG D, LI X, LI Z, SHI H, WU J, YU J, ZHANG Y

Multi-station graphene rapid growth apparatus, has fixed platform that is provided with heating device moving device for moving heating device from outside of process chamber outer tube to outside of other process chamber outer tube.

DUAN Y, HUANG D, LI H, LI Z, SHI H, WANG Z, WU J, YU J, ZHANG Y

High temperature process chamber vertical arrangement of graphene continuous growth apparatus, has second high temperature process chamber and receiving cooling chamber guide roll received on graphene substrate receiving roll.

DUAN Y, HUANG D, LI X, LI Z, SHI H, WU J, YU J, ZHANG Y