国家/地区 中国（14）
IPC部 C（14）
IPC大类 C23（14）
IPC小类 C23C（14） H01L（3） C01B（2）
IPC C23C016/455（14）
发明人 CHEN B（2） LI J（2） XU X（2）
公开年 2022（9） 2023（5）
申请年 2022（14）
专利权人

Gas pipeline for transmitting process gas from gas supply source to reaction chamber of semiconductor device, has first section and third section that are respectively provided with first heating unit and second heating unit capable of independently controlling temperature.

YIN N

Depositing polystyrene microspheres by selecting substrate for polystyrene microsphere deposition, placing substrate on substrate in reaction chamber of atomic layer deposition instrument, vaporizing diethyl zinc, ultrasonically dispersing and soaking substrate in polystyrene microsphere suspension.

GENG Z, PU J, CAO Q, DU J, XU X, ZHANG H, GUAN C

Photoanode used for photoelectrochemical decomposition of water and oxygen evolution, comprises base layer, dielectric passivation layer and sandwich composite layer arranged in sequence.

GONG J, XIE G

Box type negative-pressure roll-to-roll preparation device, has protective gas and carbon source supply mechanism connected with box body to introduce carbon source and protective gas into box body.

WU Q, SONG S, MA Y

Preparing confinement structure composite material comprises forming nanoporous material layer of first material and second material filled in nanopore, so that nanopores form hydrophilic or hydrophobic confinement space.

XU W, ZHANG Q, CHEN B, XIAO X

Lifting metal-based composite material mechanical property using titanium dioxide surface modified graphene, comprises e.g. pouring graphene raw material into acid solution, pickling, ultrasonically cleaning, filtering, drying, low-energy ball milling, heating, pressurizing and sintering.

TANG B, CHEN M, WAN J, GE H, YAN Q, CHEN B, LI J

Method for preparing self-cleaning composite surface enhanced Raman scattering (SERS) substrate used in surface science, analysis science and biological science involves sputtering gold nano-particles to surface of zinc oxide film to obtain SERS substrate.

LI J, ZHANG X, SHI G, WANG B, ZHANG J

Preparing single crystal substrate comprises forming gallium nitride porous layer on surface of sapphire substrate, depositing barrier layer e.g. silica to cover top surface of the porous layer, removing barrier layer, performing epitaxial growth of single crystal layer and separating.

LU J

Converting in-situ amorphous carbon into graphene film useful in e.g. field of flexible electronic device and solar cell, comprises e.g. using physical vapor deposition technology to prepare graphene film precursor, and annealing the precursor to obtain graphene film under vacuum condition.

YANG L, WANG Y, WANG A, WANG Z, WANG L

Preparing silicon negative electrode coated with polymer polyurea coating for improving long-term stable cycle life of silicon-based negative electrode, involves using silicon material or silicon carbon material as active material, and adding binder and conductive agent to prepare electrode.

SUN Y, MU T, SUN X