国家/地区 中国（4）
IPC部 C（4） B（2） H（2）
IPC大类 C01（3） C23（3） H01（2）
IPC小类 C01B（3） C23C（3） H01L（2）
IPC C01B031/04（3） C23C016/26（3） C23C016/455（3）
C23C016/46（3） C01B031/02（2） C01B032/16（2）
C01B032/182（2） C01B032/186（2）
发明人 TEO K B K（3） JOUVRAY A（2）
公开年
申请年 2014（2） 
专利权人 AIXTRON SE（4）

Deposition of two-dimensional layer on substrate, involves feeding process gas through supply line into gas distribution chamber(s) of gas inlet containing gas outlet openings which open into process chamber, and heating substrate.

TEO K B K, MCALEESE C, CONRAN B R, MACALIZ C

Separating carbon structure including e.g. graphene and carbon nanotube deposited on seed structure, comprises e.g. providing carbon structure into processing chamber, heating carbon structure and seed structure, and supplying etching gas.

MATHARU J, THOMAS S, TEO K B K, JOUVRAY A, JOUBEUREI A, MATARU J, TOMASEU S

Apparatus for separating carbon-containing structures in form of nanotubes or graphene, has plate-shaped component that is arranged in process chamber housing and inserted in retaining recess formed in wall of process chamber housing.

RIPPINGTON D E, JOUVRAY A, RUPESINGHE N L, TEO K, TEO K B K, RUPESINGHE N

Transferring graphene films from substrate to another substrate, during manufacturing of e.g. touch display, involve forming material layer on part of surface of first substrate, and attaching second substrate to second surface of layer.

WILLNER B I, WILLNER B