国家/地区 中国（4）
IPC部 H（2）
IPC大类 H01（2）
IPC小类 H01L（2）
IPC
发明人 LI B（2） LI Z（2） LIU R（2）
OU X（2） SUN F（2） TANG B（2）
XIE L（2） YANG Y（2） ZHANG P（2）
公开年 2021（3）
申请年 2021（4）
专利权人 INST MICROELECTRONICS CHINESE ACAD SCI（4）

Depositing high-quality aluminum oxide thin films on surface of graphene comprises cleaning graphene substrate and adding into atomic layer deposition chamber, passing water molecules into atomic layer deposition chamber for pretreatment, obtaining required film and cooling.

LI N, LU W, LIU T, ZHANG Y, FAN T, XIA Y, WU S, TANG C, QU F

Graphene-based photoelectric detector for converting optical signal into electric signal, has electrode connected with graphene layer for deriving type carrier under action of external electric field, where carriers are opposite to each other.

LI Z, XIE L, LI B, LIU R, OU X, SUN F, ZHANG P, TANG B, YANG Y

Electro-optic modulator used in optical communication, has two electrodes that are formed above substrate, where one electrode is electrically connected with optical waveguide structure and another electrode is electrically connected with graphene layer.

LI Z, XIE L, OU X, LI B, LIU R, ZHANG P, SUN F, TANG B, YANG Y

Radio frequency switch device for radio frequency circuit of electronic device, has resistive-switching element formed on substrate, provided with bottom electrode and top electrode and attached with resistance change layer.

ZHAO B, BI J, ZHU W, XI K, HAN T, TIAN M