国家/地区 韩国（6）
IPC部 B（4） C（4） G（4）
H（3）
IPC大类 C01（4） G03（4） B01（3）
H01（3）
IPC小类 C01B（4） G03F（4） B01J（3）
IPC G03F001/22（4） G03F001/62（4） C01B032/184（3）
G03F001/64（3） G03F007/20（3） C01B032/182（2）
C01B032/194（2）
发明人 KIM H K（5） KIM H M（4） KIM H Y（4）
KIM S G（4） MI K H（4） CHO J W（3）
KIM H（3） JEONJUNHYUCK（2） KIM S K（2）
KIMHYUNGKEUN（2） LEE G H（2）
公开年 2021（2） 2022（2）
申请年 2022（3）  2020（2） 
专利权人 KOREA ELECTRONICS TECHNOLOGY INST（6）

Anode used for lithium secondary battery, comprises anode active material comprising carbon-based material and metal-based compound, binder, and multi-composite conductive agent comprising carbon-based conductive agent and metal-based conductive agent having different physical properties and shapes.

LEE J, WOO S, SANGGIL W, JENAM L

Performing low-temperature direct growth method of multilayer graphene for manufacturing pellicle for extreme ultraviolet lithography, involves forming etch stopper on substrate, and forming seed layer on etch stopper, where seed layer is selected from boron nitride, or boron carbon nitride.

KIM H Y, CHO J W, KIM H M, KIM S G, KIM H K, KIM H, MI K H, KIM S K

Pellicle i.e. consumable component for protecting mask from contaminants in lithography process for semiconductor or display manufacturing, has substrate whose central portion is formed with opening, and pellicle layer containing amorphous carbon and core layer, formed on support layer.

KIM H Y, CHO J W, KIM H M, KIM S G, KIM H K, KIM H, MI K H, KIM S K, JEONJUNHYUCK, LEE S M

Preparing pellicle for extreme UV exposure with graphene defect healing layer, involves forming support layer of silicon nitride material on silicon substrate, and forming core layer of graphene material on support layer.

KIMHYUNGKEUN, MI K H, LEE W S, YANG H S, JOJINWOO, KIM B, JEONJUNHYUCK, LEE G H, KIM H Y, JEON J H, KIM S G, CHO J W, KIM H M, KIM H K

Directly growing multilayer graphene used in a pellicle for extreme ultraviolet lithography, involves forming small-layer graphene on SiN substrate, forming metal catalyst layer on small-layer graphene, and forming an amorphous carbon layer.

KIMHYUNGKEUN, MI K H, KIM H Y, LEE G H, SUNG K H, KIM H M, KIM S G, KIM H K

Graphene-based laminate has substrate, graphene layer which is formed at upper portion of substrate, and organic dopant which is formed on surface(s) of substrate.

KIM H, KIM T, YANG W, KIM H K, KIM T Y, YANG W S