国家/地区 韩国（4） 美国（2） 世界知识产权组织（2）
IPC部 B（3） C（3）
IPC大类 B01（3） C01（3）
IPC小类 B01J（3） C01B（3）
IPC C01B031/02（3） B01J019/24（2）
发明人
公开年 2015（4）
申请年 2013（2） 
专利权人 KOREA RES INST STANDARDS SCI（4）

Hydrogen detection sensor, has variable resistor whose resistance value is changed based on control signal, where thin film-type palladium material and thin film-type graphene material are coated on core.

NAHM S, BAEK U B, LEE S C, CHEONG I

Manufacture of monocrystal graphene film for semiconductor device, involves forming polycrystalline graphene on substrate using hydrocarbon gas, growing graphene film, forming catalyst, heating and recrystallizing.

HWANG C, HWANG C Y

Inductive heating graphene forming apparatus comprises dielectric tube, induction heating coil, alternating current power supply to provide alternating current on induction heating coil and heating block heated by induction heating coil.

JUNG H K, YONG H S, SHINJAE Y, DAE J S, JOO I L, YONG S Y

Apparatus useful for etching graphene comprises a vacuum chamber, a reaction gas inlet port to pass reaction gas inside of vacuum chamber, stage provided with graphene pattern layer, and a sensor to sense graphene pattern layer temperature.

BAE M H, LEE T H, KIM N, HA D H