| 国家/地区 | 中国(7) |
| IPC部 | C(4) H(3) |
| IPC大类 | C01(4) H01(3) |
| IPC小类 | C01B(4) H01L(3) |
| IPC |
C01B031/04(4)
H01L021/336(3)
H01L021/28(2)
|
| 发明人 |
JIANG M(7)
|
| 公开年 | 2014(6) |
| 申请年 |
2014(7)
|
| 专利权人 |
SHANGHAI INST MICROSYSTEM INFORMATION(7)
|
DING G, JIANG M, XIE X, TAO H, YANG S
WANG H, JIANG M, LI L, XIE X, WU T, CHEN J, LU G, XIE H, ZHANG X
XIE X, DING G, JIANG M, HE P
WANG H, JIANG M, XIE X, WU T, CHEN J, SUN Q, XIE H, ZHANG X
WANG H, JIANG M, XIE X, WU T, CHEN J, LU G, SUN Q, XIE H, ZHANG X
XIE X, JIANG M, TIAN S, DING G, HE P, SUN J
XIE X, JIANG M, TIAN S, DING G, HE P, SUN J
