| 国家/地区 |
中国(6)
|
| IPC部 |
C(5)
B(3)
H(2)
|
| IPC大类 |
C01(5)
C23(5)
B82(3)
C30(2) H01(2) |
| IPC小类 |
C01B(5)
C23C(5)
B82Y(3)
C30B(2) H01L(2) |
| IPC |
C01B031/04(5)
C23C016/26(4)
B82Y040/00(3)
C23C016/02(3) B82Y030/00(2) |
| 发明人 |
DING G(5)
XIE X(5)
JIANG M(4)
TANG S(3) CHEN J(2) DI Z(2) GONG Q(2) SUN L(2) WANG S(2) |
| 公开年 |
2012(6)
|
| 申请年 | 2012(4) 2011(2) |
| 专利权人 |
SHANGHAI INST MICROSYSTEM INFORMATION(6)
|
CHAI Z, CHEN J, LUO J, WU Q, YU T
DI Z, DING G, GONG Q, LIU Q, WANG H, WANG S, XIE X
DI Z, DING G, GONG Q, JIANG M, SUN L, WANG S, XIE X, ZHU Y
DING G, JIANG M, SHEN H, SUN L, TANG S, WU T, XIE X
CHEN J, DING G, JIANG M, TANG S, WANG C, XIE X
