国家/地区 世界知识产权组织（4） 日本（3） 美国（3） 韩国（2）
IPC部 C（4） H（3）
IPC大类 C23（4） H01（3） H05（3）
C01（2）
IPC小类 C23C（4） H01L（3） H05H（3）
C01B（2） H01J（2）
IPC C23C016/26（4） C23C016/44（3） C23C016/511（3）
H01L021/205（3） H05H001/46（3） C01B032/186（2）
C23C016/455（2） H01J037/32（2）
发明人 UEDA H（4）
公开年 2021（2） 2022（2）
申请年 2020（2） 
专利权人 TOKYO ELECTRON LTD（4）

Vacuum processing apparatus for removing oxidizing gas, comprises decompressable process container, supply port that is formed on side wall of process container and configured to supply, to process container, and apparatus also comprises ionic liquid that absorbs oxidizing gas.

HAYAKAWA T, UMESHITA N, AKIYAMA K, SEKIGUCHI K, ASAKO R, NAKANO T, ARYAL D, ROTONDARO A, IWASHITA M, IIZUKA Y, UEDA H

Film formation method involves forming metal film on silicon-containing film of substrate, forming a graphene film on metal film, where metal film is silicided by heating metal film, and continuously performing film forming process.

UEDA H, WADA M, ZHEN

Film forming by cleaning interior of treatment container, extracting and removing oxygen inside treatment container, introducing substrate into treatment container, and forming carbon film on substrate by plasma chemical vapor deposition.

MAKOTO W, TAKASHI M, NOBUTAKE K, RYOTA I, MASAHITO S, HIROKAZU U, MATSUMOTO T, KABURAGI N, IFUKU R, SUGIURA M, UEDA H, WADA M, KABUKI N

Processing device for forming film, consists of processing container having thermal sprayed ceramic coating on inner wall, mounting table for holding substrate and control unit for performing precoating and film forming.

WADA M, MATSUMOTO T, SUGIURA M, IFUKU R, UEDA H, KURYOTA L