国家/地区 美国（5） 韩国（4） 中国（2）
IPC部 C（3） H（3） B（2）
G（2）
IPC大类 H01（3） C01（2） G03（2）
IPC小类 H01L（3） C01B（2） G03F（2）
IPC G03F007/09（2） G03F007/11（2） H01L021/027（2）
发明人 CHO Y（5）
公开年 2016（4）
申请年 2015（5）
专利权人 SAMSUNG ELEC.（3）

Hardmask composition used for forming pattern, comprises several graphene nanoparticles having size of preset range, and solvent.

SHIN H, KIM S, SEOL M, PARK S, CHO Y, SHIN H J, KIM S W, SEOL M S, PARK S J, CHO Y C, XUE M, ZHAO L

Hardmask composition for pattern formation comprises a set of graphene nanosheets, each being doped with boron and/or nitrogen, and a solvent.

SEOL M, KIM S, SHIN H, PARK S, CHO Y, SEOL M S, KIM S W, SHIN H J, PARK S J, CHO Y C

Layer structure for electronic device, has material layers which are on sides of diffusion barrier layer and diffusion barrier layer includes nano-crystalline graphene layer.

SONG H, NAM S, CHO Y, PARK S, SHIN H, LEE J, SONG H J, NAM S G, CHO Y C, PARK S J, SHIN H J, LEE J H

Formation of complex plating film used in electronic material, involves adding graphene-coated metal powder to plating solution, and forming plating film by performing electric plating in solution to which metal powder is added.

SUH S, SONG Y, PARK J, KIM T, SON H, SHIN J, LEE M, LEE J, LEE C, CHO Y, BAEG S, AHN B, YUN S

Composite film, has oxide graphene coating layer whose contact angle is maintained on porous polymer supporter at specific degrees, where width of oxide graphene coating layer is in specific range.

PARK H B, KIM H W, CHO Y, YOO B M, HWANG Y S, HO B P, HWANG Y, KIM H, PARK H, YOO B, ZHAO Y