| 国家/地区 | 美国(4) |
| IPC部 | H(4) B(2) |
| IPC大类 | H01(4) B82(2) |
| IPC小类 | H01L(4) B82Y(2) |
| IPC |
H01L029/06(3)
H01L029/66(3)
H01L029/775(3)
B82Y010/00(2) B82Y040/00(2) B82Y099/00(2) H01L021/02(2) H01L021/28(2) H01L029/10(2) H01L029/16(2) H01L029/78(2) H01L051/00(2) H01L051/05(2) |
| 发明人 |
GRILL A(4)
|
| 公开年 |
2014(4)
|
| 申请年 | 2013(2) 2014(2) |
| 专利权人 | INT BUSINESS.(4) |
CHU J O, DIMITRAKOPOULOS C D, GRILL A, MCARDLE T J, PFEIFFER D, SAENGER K L, WISNIEFF R L
BONILLA G, DIMITRAKOPOULOS C D, GRILL A, HANNON J B, LIN Q, NEUMAYER D A, OIDA S, OTT J A, PFEIFFER D
COHEN G, DIMITRAKOPOULOS C D, GRILL A
