国家/地区 日本（4） 美国（3）
IPC部 H（4） C（3）
IPC大类 H01（4） C01（3）
IPC小类 H01L（4） C01B（3）
IPC H01L029/786（4） C01B031/02（3） H01L021/336（3）
H01L021/20（2） H01L029/06（2）
发明人 HIROKA M（4）
公开年 2011（2）
申请年 2010（2） 
专利权人 HITACHI LTD（4） OKAI M（3） HIROOKA M（2） WADA Y（2）

Circuit apparatus for e.g. electronic integrated circuit device, comprises graphene film which consists of several layers, metal electrode directly joined to graphene film, and another metal electrode directly joined to graphene film.

OKAI M, HIROKA M, WADA Y

Circuit apparatus for electron and optical integrated circuit apparatus comprises electrically joined graphene film and metal electrode, and aluminum oxide layer formed directly under the graphene film.

OKAI M, HIROKA M, WADA Y, HIROOKA M

Substrate having graphene film used in electronic/photonic device comprises base substrate, patterned aluminum oxide film formed on base substrate, and graphene oxide film having graphene atomic layer.

OKAI M, HIROOKA M, WADA Y, IWAI Y, HONMA S, ASHIGAHARA T, TAKAYUKI A, YOSHIAKI I, SHUNICHI H, HIROKA M, HOMMA S

Substrate used for electron and optical integrated circuit apparatus, has graphene layer which is grown parallel with respect to surface of substrate and atomic layer of metal oxide provided on other surface of substrate.

HIROKA M, KYOTANI T, OKAI M, ORIKASA H, ORIGASA H, HIROOKA M