国家/地区 韩国（4） 美国（4）
IPC部 G（4） C（3） H（3）
IPC大类 G03（3） H01（3） C01（2）
G02（2） H05（2）
IPC小类 G03F（3） H01L（3） C01B（2）
IPC C01B031/04（2） H01L021/027（2）
发明人 KIM M J（4）
公开年 2017（2）
申请年 2016（2） 
专利权人 SAMSUNG ELECTRONICS CO LTD（4）

Adhesive composition for reticle assembly, comprises a polyphenol compound including tannic acid, a polymer including polyvinyl alcohol and a solvent including water and alcohol.

LEE Y, JEONG C Y, LEE H, YOO B, KIM M J, KIM M, RYU B C, LEE H S, YOUNG J C, DING C, LI H, LIU B

Conductor for electronic device comprises substrate, conductive layer disposed on substrate and having islands containing graphene whose surfaces have p-type dopant, and another conductive layer containing conductive metal nanowire.

SOHN H, KWAK C, KIM M J, PARK H C, SHIN W, CHO Y

Extreme UV light generation apparatus for generating extreme UV light to realize testing system, has optical unit fixed in chamber, and protection film provided adjacent to optical unit, where protection film includes graphite or graphene.

KIM E, KIM M J, PARK J, LEE D, KIM B

Photomask has anti-contamination layer that is provided with graphene layer, is configured to contact with top surfaces of patterns, and is spaced apart from substrate between the patterns.

KIM M J, LEE D, KIM S