国家/地区 韩国（5）
IPC部 G（4） B（3） H（3）
C（2）
IPC大类 H01（3） C01（2） G03（2）
IPC小类 H01L（3） C01B（2） G03F（2）
IPC G03F001/22（2） G03F001/62（2） G03F001/64（2）
G03F007/20（2） H01L029/16（2）
发明人 KIM S K（5）
公开年 2022（2）
申请年 2022（2） 
专利权人 KOREA ELECTR.（2）

Performing low-temperature direct growth method of multilayer graphene for manufacturing pellicle for extreme ultraviolet lithography, involves forming etch stopper on substrate, and forming seed layer on etch stopper, where seed layer is selected from boron nitride, or boron carbon nitride.

KIM H Y, CHO J W, KIM H M, KIM S G, KIM H K, KIM H, MI K H, KIM S K

Pellicle i.e. consumable component for protecting mask from contaminants in lithography process for semiconductor or display manufacturing, has substrate whose central portion is formed with opening, and pellicle layer containing amorphous carbon and core layer, formed on support layer.

KIM H Y, CHO J W, KIM H M, KIM S G, KIM H K, KIM H, MI K H, KIM S K, JEONJUNHYUCK, LEE S M

Glucose sensor for measuring glucose level has noble metal-graphene composites and electrode to which glucose oxidase or glucose dehydrogenase and noble metal-graphene composites are fixed.

JANG H D, CHANG H K, KIM S K, ROH K M, CHANG H

Gas barrier film used for flexible substrate, has primary graphene layer formed on macromolecular film, and membranous polymer film.

KIM T H, KIM Y K, KEE S B, KIM S K, IM C G, HO K T, GWON K Y, BEOM G S, GUK K S, GYU I C

Semiconductor device e.g. transistor silicon-based MOSFET, for use as e.g. touch sensor in organic LCD device, has unit layers spaced apart from each other along vertical direction and including patterned graphene layers.

KIM S, CHOI W, JIN Y, KIM S K, JIN Y W