国家/地区 韩国（5） 美国（4） 中国（2） 欧洲专利局（EPO）（2）
IPC部 H（4） C（3） B（2）
G（2）
IPC大类 H01（4） C01（3）
IPC小类 C01B（3） H01L（3）
IPC C01B031/04（3） C01B033/12（2） H01L021/02（2）
发明人 LEE C S（5）
公开年 2017（5）
申请年 2016（4） 
专利权人 SAMSUNG ELEC.（4）

Photomask pellicle for protecting photomask in exposure process using light including extreme UV (EUV), has nanocrystalline graphene that comprises nanocrystalline crystal grains and grains comprise two dimensional carbon structure.

SHIN H J, SONG H J, PARK S J, SHIN K W, LEE C S, SHIN H, SONG H, PARK S, SHIN K, LEE C

Producing biosensor, by forming patterned convex portion on substrate, obtaining graphene layer, separating substrate and graphene layer, processing surface of graphene layer and combining detection unit with resonant unit.

LEE C S, BAE M H, SEO J T, LEE S W, KIM H S, KIM Y S

Method for fabricating graphene nano-mesh in e.g. transparent display device, involves forming graphene nano-mesh including openings by etching oxide layer, and transferring graphene nano-mesh onto substrate after removing catalyst layer.

LEE J, KIM Y, LEE C, LEE J H, KIM Y S, LEE C S

Method for patterning graphene holes on substrate during manufacturing display device, involves forming hole patterns spaced apart from each other on graphene layer by irradiating pulse laser while graphene layer is in motion.

LEE J, WOO Y, LEE C, CHO E, LEE J Y, WOO Y S, LEE C S, CHO E H

Multilayer structure for electronic device has diffusion barrier layer between first material layer and second material layer, that includes non-graphene-based two-dimensional (2D) material.

SONG H, NAM S, PARK S, SHIN K, SHIN H, LEE J, LEE C, CHO Y, SONG H J, NAM S G, PARK S J, SHIN K W, SHIN H J, LEE J H, LEE C S, CHO Y C, NA S, ZHAO L