国家/地区 日本（4）
IPC部 H（4）
IPC大类 H01（4） H10（2）
IPC小类 H01L（4） H10K（2）
IPC H01L021/336（3） H01L029/786（3） H01L021/28（2）
H01L027/144（2） H01L027/146（2） H01L029/417（2）
H01L031/08（2） H01L051/05（2） H01L051/30（2）
H10K071/10（2） H10K085/20（2）
发明人 SUDA S（4）
公开年 2022（2） 2023（2）
申请年 2021（4）
专利权人 FUJITSU LTD（4）

Manufacturing method of graphene optical sensor, involves forming resist layer on side opposite to metal layer, forming pattern on resist layer by imprint and etching graphene using resist layer on which pattern is formed as mask.

SUDA S

Manufacturing method of electronic apparatus, involves placing graphene layer in contact with liquid film, placing laminated structure on liquid film and vaporizing liquid film to bring graphene layer into contact with second substrate.

SUDA S

Electronic device e.g. electronic apparatus, has island-like insulating film that is provided to cover second region which is adjacent to second surface of graphene in first region covered with first electrode.

ASO H, KONDO O, HAYASHI K, SUDA S

Electronic device e.g. electronic apparatus, has first electrode which is provided on first surface of graphene and has first opening portion leading to first surface.

SUDA S