国家/地区 美国（5） 世界知识产权组织（5） 中国（3） 欧洲专利局（EPO）（3） 日本（2）
IPC部 B（6）
IPC大类 B32（6）
IPC小类 B32B（6）
IPC C01B032/186（6）
发明人
公开年 2016（2） 2021（2）
申请年 2015（2） 
专利权人

Pellicle film used for preventing dust from adhering to photomask or reticle, comprises layers laminated to each other and/or layers provided with one or more openings.

TAKADA N, SEKI K, KODERA Y, SEKIGAZUNORI, YUTAKA G

Producing graphene film by immersing graphene film and resin layer in laminate made of graphene film arranged on base material and resin layer arranged on graphene film in non-polar solvent and immersing in solution for removing resin layer.

OKIKAWA Y, YAMADA T, HASEGAWA M

Manufacturing method for nano structure antireflection film, involves forming antireflection film using graphene as growth substrate, after forming hexagonal graphene honeycomb lattice on silicon dioxide layer.

ZHA G

Forming a graphene device, used to form sensor device, comprises forming a graphene film over a substrate, depositing a polymer material covering a surface of the film, by gas phase deposition, and removing the substrate from the film.

KALITA D, BOUCHIAT V, MARTY L, BENDIAB N

Method for preparing graphene conductive film for flexible touch device, involves growing graphene layer on metal-catalyzed base, and coating polyamic acid solution layer on graphene layer, where polyimide film is formed by thermal curing.

DI Y

Multilayer structure of capacitor, has first and third layers each form one of two dee-trodes and comprise pyrolysed carbon nanomembranes or layers of graphene, and second layer is dielectric comprising car-bon nanomembranes.

BEYER A, GOLZHAUSER A, PENNER P, ZHANG X, GOELZHAEUSER A