国家/地区 韩国（6）
IPC部 B（6）
IPC大类 B32（6）
IPC小类 B32B（6） C01B（6） C23C（2）
IPC C01B032/194（6）
发明人 YI S（3）
公开年 2022（3） 2021（2）
申请年 2021（6）
专利权人 ALPHA GRAPHE.（3）

Wrinkle flattening unit for flattening wrinkles present in graphene composite structure, has rotation portion that comprises outer rotation unit having multiple suction holes communicating with branch passage and supporting one surface of composite structure.

CHO S M, CHO M G, OH H G, CHO M, OHHONGGI

System for transferring graphene to transfer substrate e.g. wafer in vacuum equipment, has substrate loading unit that is provided with transfer substrate onto which graphene is transferred and jig that is seated by inserting transfer substrate into seating groove.

YI S

Device e.g. in graphene transfer method comprises support part disposed under graphene transfer unit, moves graphene transfer unit in upper or lower direction, and substrate loading part transferred in chamber body, disposed on support part.

YI S

System e.g. in graphene transfer method comprises e.g. graphene conveying unit having carrier substrate adhered with graphene and heat treatment module disposed under jig with transfer substrate inserted into seating groove to be seated.

YI S, LEE S K

Transferring graphene involves forming graphene on first substrate, forming polymer precursor mixture on second substrate, providing graphene oppositely to second substrate having polymer precursor mixture.

GU T J, JANG W, SEO Y, WHANG D, WHANG D M, SEO Y M, JANG W S

Pellicle film used for preventing dust from adhering to photomask or reticle, comprises layers laminated to each other and/or layers provided with one or more openings.

TAKADA N, SEKI K, KODERA Y, SEKIGAZUNORI, YUTAKA G