国家/地区 中国（36）
IPC部 C（36） H（14） B（10）
G（5）
IPC大类 C23（36）
IPC小类 C23C（36） H01L（10） C01B（6）
B82Y（5） B01J（3） C25D（3）
H01M（3） B22F（2） C01G（2）
C30B（2） G01N（2） H01J（2）
IPC C23C016/40（36）
发明人 ZHANG H（5） LI J（4） WANG G（3）
CHEN B（2） CHEN Y（2） JIANG T（2）
LI H（2） NARKEVICIUTE I（2） SHARMA K（2）
SHI Z（2） VARADARAJAN B N（2） WAN G（2）
WANG X（2） WANG Y（2） XU X（2）
公开年 2021（11） 2022（9） 2023（5） 2020（4） 2017（2）
申请年 2021（13）  2022（10）  2020（5）  2016（2）  2019（2） 
专利权人 LAM RES CORP（2） NINGBO INST .（2） UNIV HAINAN（2）

Depositing polystyrene microspheres by selecting substrate for polystyrene microsphere deposition, placing substrate on substrate in reaction chamber of atomic layer deposition instrument, vaporizing diethyl zinc, ultrasonically dispersing and soaking substrate in polystyrene microsphere suspension.

GENG Z, PU J, CAO Q, DU J, XU X, ZHANG H, GUAN C

Normally-closed gallium nitride integrated device of large threshold voltage used in mobile phone, has sub-gate composed of gate layer connected through graphene film electrode to form series-parallel mixed double high frequency characteristics high electron mobility transistor integrated structure.

LUO M, CHENG T, WANG X, ZU Y, YU C

Depositing high-quality aluminum oxide thin films on surface of graphene comprises cleaning graphene substrate and adding into atomic layer deposition chamber, passing water molecules into atomic layer deposition chamber for pretreatment, obtaining required film and cooling.

LI N, LU W, LIU T, ZHANG Y, FAN T, XIA Y, WU S, TANG C, QU F

Photoanode used for photoelectrochemical decomposition of water and oxygen evolution, comprises base layer, dielectric passivation layer and sandwich composite layer arranged in sequence.

GONG J, XIE G

Preparing confinement structure composite material comprises forming nanoporous material layer of first material and second material filled in nanopore, so that nanopores form hydrophilic or hydrophobic confinement space.

XU W, ZHANG Q, CHEN B, XIAO X

Lifting metal-based composite material mechanical property using titanium dioxide surface modified graphene, comprises e.g. pouring graphene raw material into acid solution, pickling, ultrasonically cleaning, filtering, drying, low-energy ball milling, heating, pressurizing and sintering.

TANG B, CHEN M, WAN J, GE H, YAN Q, CHEN B, LI J

Conductive pre-coating useful for e.g. fuel cell titanium plate, comprises first metal particle layer distributed on surface of titanium substrate, in-situ oxidation layer covering surface of first metal particle layer, and second metal layer covering surface of in-situ oxidation layer.

LAN S, HU P, JIANG T, BI F, LI H

Method for preparing self-cleaning composite surface enhanced Raman scattering (SERS) substrate used in surface science, analysis science and biological science involves sputtering gold nano-particles to surface of zinc oxide film to obtain SERS substrate.

LI J, ZHANG X, SHI G, WANG B, ZHANG J

Preparing single crystal substrate comprises forming gallium nitride porous layer on surface of sapphire substrate, depositing barrier layer e.g. silica to cover top surface of the porous layer, removing barrier layer, performing epitaxial growth of single crystal layer and separating.

LU J

Graphene sensor composite heat protection structure, comprises substrate layer, graphene sensitive layer, nitride isolation layer, alumina protective layer, and high temperature ceramic protective coating, where substrate layer is provided with a graphene sensitive layer.

LI M, ZHANG H, WANG J