国家/地区 中国（5） 美国（2） 世界知识产权组织（2）
IPC部 C（8）
IPC大类 C23（8）
IPC小类 C23C（8） H01L（5） C01B（3）
IPC C23C016/50（8）
发明人
公开年 2022（8）
申请年 2021（5）  2022（2） 
专利权人

Preparing friction nano-generator based on vertical graphene array, comprises growing vertical graphene array on metal electrode by plasma enhanced chemical vapor deposition method, spin coating layer of polymer film, drying and curing.

ZOU J, ZHONG G, LIU G, LUO J, JIN H, XUAN W, ZHANG L, DONG S, LIU S

Carrier plate structure for preparing single crystal silicon heterojunction solar cell, has graphite frame whose front and back surfaces are provided with coating structure, where coating structure is symmetrically arranged.

YANG M, LIU M

Processing semiconductor by generating plasma of carbon- and hydrogen-containing precursors, forming layer of graphene on substrate, and halting flow of carbon-containing precursor while maintaining plasma with hydrogen-containing precursor.

INGLE N K, MALLICK A B, SINGHA R S, WANG J, ROY S S

Method for preparing transparent electric heating device using metal-nano carbon conductive film, involves using packaging process to prepare transparent high temperature-resistant electric heating device, on basis of metal graphene/carbon nano-tube composite transparent conductive film obtained.

PAN Z, TAN H

Forming film by carrying substrate having recess into processing container, placing on mounting table provided in processing container, using plasma of mixed gas containing inert gas and carbon-containing gas, while applying high frequency bias, and forming graphene film on substrate.

SUGIURA M, MATSUMOTO T

Preparing gallium nitride film used for blue light emitting diode, comprises e. g. drying pre-processed substrate with high-purity nitrogen, adding into vacuum reaction chamber, heating, stabilizing first preset time, and using remote ammonia plasma to process second preset time.

YAN T, YE Z, REN W, WANG R, ZHANG Y

Preparation method of nano liquid absorbing core for intelligent product or electronic product, involves taking metal core and in situ growing graphene with hydrophilic functional groups on surface of the metal core.

JIA Y, WU Q, MA Y

Forming graphene product including nanocrystalline graphene by plasma enhanced chemical vapor deposition process, involves growing nanocrystalline graphene directly on substrate using plasma of reaction gas.

LEE E, LEE S, BYUN K, KIM C, LEE C, SHIN H, SHIN K, SONG H