国家/地区 | 中国(11) |
IPC部 |
C(11)![]() |
IPC大类 |
C23(11)![]() |
IPC小类 |
C23C(11)
C25F(2)
G01D(2)
H01L(2) |
IPC |
C23C016/26(11)![]() |
发明人 |
ZHANG D(11)![]() |
公开年 | 2015(3) 2016(3) 2017(2) 2018(2) |
申请年 | 2016(4) 2017(3) 2014(2) |
专利权人 |
SHANGHAI INS.(3)
BEIJING C N.(2)
INST MICROEL.(2)
LIAONING ADV.(2)
SHENYANG INS.(2) UNIV SHANGHA.(2) |
PARK G O, YOO S K, JANGDONGIL, CHUNG J H, JANG D I, ZHENG Z, ZHANG D, YU S, PARK G
LI T, TONG J, WANG Y, ZHANG L, GAO A, ZHANG D, SONG H
ZHANG X, XIONG D, CAO M, ZHANG L, CHEN C, ZHANG D
LI T, TONG J, WANG Y, ZHANG L, GAO A, ZHANG D, SONG H
XIONG D, CAO M, TAN Z, FAN G, LI Z, ZHANG D
HONG X, KUANG Y, LIU Y, SHAO Z, ZHANG D, YANG X, FENG J
DU S, GAO K, HE Y, LI N, LIN S, LIU C, WANG C, ZHANG D, YU J, SONG J
DU S, GAO K, HE Y, LI N, LIN S, LIU C, SONG J, WANG C, YU J, ZHANG D
HE L, JIANG M, LI L, XIE X, TANG S, ZHANG D, XIE H, WANG H, CHEN L