国家/地区 美国（3） 中国（2） 日本（2）
IPC部 C（6）
IPC大类 C01（6）
IPC小类 C01B（6）
IPC C23C016/44（6）
发明人 BRODEUR C L（2） IFUKU R（2） MATSUMOTO T（2）
NAGEL C J（2） WADA M（2）
公开年 2022（4） 2023（2）
申请年 2022（6）
专利权人 QUANTUM ELEM.（2） TOKYO ELECTR.（2）

Film forming method involves loading substrate into processing container, forming interface layer having amorphous structure or microcrystalline structure on substrate by plasma of first mixed gas including carbon-containing gas and forming graphene film on interface layer.

NAKAMURA G, TERADA H, MATSUMOTO T, KABUKI N, WADA M, IFUKU R, NAKAMURA K, KAMURAGI N

Process for instantiating elemental metal within ultramicro pore of nanoporous carbon powder composition involves initiating gas flow in reactor assembly, reactor chamber containing nanoporous carbon powder, first porous frit, second porous frit, reactor head space, and computer processing unit.

BRODEUR C L, NAGEL C J

Reactor assembly comprises gas inlet and one or more gas outlets and reactor chamber containing nanoporous carbon material arranged within cup and covered with cap, where first porous frit defining floor of reactor chamber arranged within cup and covered with cap, and second porous frit.

BRODEUR C L, NAGEL C J

Processing substrate by loading substrate into processing container, forming carbon film on substrate with plasma of mixed gas containing carbon-containing gas while inside of processing container is maintained at pressure, and changing inside of processing container.

WADA M, IFUKU R, MATSUMOTO T, YAMADA H, TAKASHI M

Preparation method of graphene-coated metal particles used in industry, involves filtering metal particles with uniform particles filter and performing corona treatment on the surface of the metal particles, and then uniformly mixing corona treated metal particles surface with graphene powder.

LI A, LI J

Graphite crucible useful for manufacturing integrated circuit, comprises crucible body and crucible cover, supporting platform used for horizontally placing crucible cover, groove arranged between supporting platform and inner wall and crucible cover comprises air inlet hole and air outlet hole.

CHANG B, DENG K, JIN H, WANG Z