国家/地区 中国（4）
IPC部 C（4）
IPC大类 C23（4）
IPC小类 C23C（4） B82Y（2） C01B（2）
H01L（2）
IPC C23C016/04（4）
发明人
公开年 2014（2）
申请年 2013（2） 
专利权人

Manufacturing graphene of pressure sensor, comprises e.g. manufacturing sensor structure, manufacturing mask plate of each layer of sensor structure and depositing insulating layer on silicon substrate surface.

WU X, RUI L, ZHANG Q, LU J, LI Y

Separating carbon structure including e.g. graphene and carbon nanotube deposited on seed structure, comprises e.g. providing carbon structure into processing chamber, heating carbon structure and seed structure, and supplying etching gas.

MATHARU J, THOMAS S, TEO K B K, JOUVRAY A, JOUBEUREI A, MATARU J, TOMASEU S

Deposition mask for forming patterned deposition material of e.g. organic light emitting display device, has carbon layer formed on surfaces of body portion and including carbon graphene, where openings are penetrated through surfaces.

HAN J

Graphene composite electrode material preparation method, involves providing glass substrate, forming metal thin film on glass substrate, and patterning metal thin film to form circuit image.

WANG Y