国家/地区 日本（3） 世界知识产权组织（2）
IPC部 B（4）
IPC大类 B32（4）
IPC小类 B32B（4）
IPC C01B032/184（4）
发明人 TATENO Y（4）
公开年 2021（2）
申请年 2020（2） 
专利权人 SUMITOMO ELE.（4）

Laminate used in electronic device, comprises base portion composed of silicon carbide and having specific surface which is silicon surface and graphene film on specific surface, where ion mass distribution in depth direction of laminate obtained by time-of-flight secondary ion mass spectrometry.

MIHASHI F, ADACHI M, YAMAMOTO Y, TATENO Y

Layered body useful in electronic element, such as transistor, comprises base portion comprising silicon carbide and having surface which is silicon surface, and carbon atom thin film arranged over surface and comprising carbon atoms.

MITSUHASHI F, TATENO Y, ADACHI M, YAMAMOTO Y

Laminate used for electronic device, comprises graphene film and base portion comprising silicon carbide, and has ion mass distribution in stack depth direction obtained by using bismuth ions as primary ions and cesium ions as sputter ions.

MITSUHASHI F, TATENO Y, ADACHI M, YAMAMOTO Y

Manufacture of substrate for electronic apparatus, involves forming silicon carbide layer on silicon substrate, heating upper surface of silicon carbide layer using gas, and forming graphene layer on surface of silicon carbide layer.

SAI J, SUEMITSU M, FUKIDOME H, MAKABE I, NAKABAYASHI T, TATENO Y