国家/地区 日本（4）
IPC部 C（4）
IPC大类 C01（4）
IPC小类 C01B（4）
IPC C01B031/02（3） H01L029/786（3） H01L051/05（3）
H01L051/30（3） H01L021/336（2） H01L051/40（2）
发明人
公开年 2011（2） 2012（2）
申请年 2010（4）
专利权人 FUJITSU LTD（4）

Formation of graphene sheet-type material for e.g. manufacturing semiconductor integrated circuit device, involves modifying edge portion of graphene sheet by activated electron-donating functional group.

ASANO T, HARADA N

Manufacture of semiconductor device e.g. field effect transistor used in mobile telephone base station, involves forming catalyst film on substrate, growing graphene on catalyst layer, forming gap and removing catalyst film.

HAYASHI K, SATO S

Manufacturing graphene film used in manufacturing semiconductor device, involves forming catalyst metal layer containing carbon on substrate, and growing graphene film on formed metal layer using carbon containing gas.

IKEDA M, YAMAZAKI T

Pressure sensor for measuring hydraulic pressures, has transistor equipped with graphene layer as channel, and wire containing piezoelectric material and whose one side is connected on gate of transistor.

YAGISHITA Y