国家/地区 中国（5）
IPC部 B（5）
IPC大类 B01（5）
IPC小类 B01D（5）
IPC B01D067/00（5）
发明人
公开年
申请年 2015（2） 
专利权人

Method for manufacturing pellicle for lithographic apparatus involves removing first substrate portion to form freestanding membrane from graphene layer, in which freestanding membrane is supported by second substrate portion.

PETER M, ABEGG E A, GIESBERS A J, KLOOTWIJK J H, NASALEVICH M A, VAN DEN EINDEN W T, VAN DER ZANDE W J, VAN ZWOL P, VERMEULEN J P M, VLES D F, VOORTHUIJZEN W, GIESBERS A J M, VAN ZWOL P J, VOORTHUIJZEN W P, VAN DEN EINDEN W T A J, VERMEULEN J P M B

Manufacture of molded filter material involves forming support layer on graphene layer formed on initial stage substrate for graphene, forming water passage hole in support layer, and forming water passage hole in graphene layer.

KANEKO K, TAKAGI T, MURATA K, MURADA K, TAKAGE T, TAKAGI H

Use of reduced graphene oxide laminate membrane as barrier material in which reduced graphene oxide is formed from reduction of graphene oxide with reducing agent.

RAVEENDRANNAIR R, SU Y, GEIM A, RAVEENDRAN N R

Method for forming nanopore in graphene membrane in liquid environment, involves applying nanopore diameter tuning voltage pulse between membrane surfaces if electrical conductance is greater than prespecified electrical conductance.

GOLOVCHENKO J A, LU B, KUAN A T, GOLOVCHENKO J, KUAN A

Membrane used to separate compound from fluid mixture, comprises graphene monolayer including discrete pores that are chemically perforated, where each pore has uniform pore size with carbon vacancy defects in the monolayer.

DUERKSEN G L, MILLER S A