国家/地区 韩国（5）
IPC部 C（5）
IPC大类 C01（5） C23（5） H01（5）
IPC小类 C01B（5）
IPC C23C016/02（5）
发明人 NARKEVICIUTE I（2） VARADARAJAN B N（2）
公开年 2021（5）
申请年 2020（2）  2021（2） 
专利权人 LAM RES CORP（2）

Carrier substrate for transferring transfer layer from carrier substrate to product substrate, comprises carrier base substrate, protective layer, and transfer layer grown on protective layer.

BURGGRAF J, JUERGEN B

Seed layer for inducing nucleation to form layer of material used for fabricating semiconducting devices, comprises layer of two-dimensional monolayer amorphous material with disordered atomic structure to form electric potential wells for bonding adatoms to seed layer by van der Waals interaction.

OEZYILMAZ B, TOH C T, ABIDI I H, OJIYLMAZ B, TOH C, ZHUO Z, OZYILMAZ B

Encapsulating graphene in semiconductor substrate, comprises selectively depositing graphene on metal layer, depositing metal oxide over graphene by thermal-based deposition technique, and depositing hermetic barrier over metal oxide.

VARADARAJAN B N, NARKEVICIUTE I, SHARMA K

Core-shell structure useful in anode material for secondary batteries comprises metal core, and shell which is graphene.

CHOI H Y, PARK J W, EUGENE L, DOH C H, BAE Y

Depositing graphene on a metal surface of substrate by providing substrate including metal surface in reaction chamber, flowing hydrocarbon precursors into reaction chamber and toward the substrate, and generating radicals of hydrogen.

VARADARAJAN B N, NARKEVICIUTE I