国家/地区 韩国（6）
IPC部 C（6）
IPC大类 C01（6） B01（3） H01（3）
G03（2）
IPC小类 C01B（6）
IPC C01B032/182（6）
发明人 LEE G H（6）
公开年 2018（2） 2021（2）
申请年 2016（2）  2020（2） 
专利权人 KOREA ELECTR.（2） KOREA RES IN.（2）

Manufacture of thin film used for field effect transistor, involves providing graphene layer on one surface of substrate, functionalizing other surface opposite to one surface of substrate using reactant, depositing thin film on functionalized graphene layer, and separating thin film by heating.

LEE G H, RYU H J, RYU H

Preparing pellicle for extreme UV exposure with graphene defect healing layer, involves forming support layer of silicon nitride material on silicon substrate, and forming core layer of graphene material on support layer.

KIMHYUNGKEUN, MI K H, LEE W S, YANG H S, JOJINWOO, KIM B, JEONJUNHYUCK, LEE G H, KIM H Y, JEON J H, KIM S G, CHO J W, KIM H M, KIM H K

Directly growing multilayer graphene used in a pellicle for extreme ultraviolet lithography, involves forming small-layer graphene on SiN substrate, forming metal catalyst layer on small-layer graphene, and forming an amorphous carbon layer.

KIMHYUNGKEUN, MI K H, KIM H Y, LEE G H, SUNG K H, KIM H M, KIM S G, KIM H K

Composition useful in composite material and device for controlling reduction state of graphene oxide, adjusting reduction state and electrical conductivity of graphene through flash annealing, comprises specific metal nanoparticles.

LEE J O, JEONG D W, CHAE S S, LEE G H, LEE S S, JEONG S H, KIM T G

Selectively controlling photoreduction and heat reduction of graphene oxide during flash annealing involves selecting bottom material and/or structure of substrate or container and performing flash annealing on graphene oxide on substrate.

LEE J O, JEONG D W, LEE S S, JEONG S H, LEE G H, JI S G, KIM T G

Sandwich-type graphene composite structure used for forming cathode of lithium-ion secondary battery, consists of graphene oxide sheet layers and silicon nanoparticle layer provided on graphene oxide sheet layer.

KANG Y, AGYEMAN D A, SONG K, LEE G, KANG Y M, AGYEMAN A D, SONG K S, LEE G H