国家/地区 世界知识产权组织（7）
IPC部 C（7）
IPC大类 C30（7）
IPC小类 C30B（7）
IPC C01B031/04（2） C01B032/186（2） C01B032/194（2）
C30B025/22（2）
发明人
公开年 2023（2）
申请年 2020（2） 
专利权人

Pellicle used for reticle for extreme-UV exposure, comprises pellicle film through which extreme-UV rays transmit and support frame for supporting pellicle film, where pellicle film comprises multilayer thin film structure.

KIM Y H, KIMYONGHWAN

Strain measurement sensor used for wearable device to measure biosignal or movement, comprises base layer formed of flexible material, and conductive thin film layer provided on surface of base layer and formed with cracks having at least one pattern of irregular straight lines or irregular curves.

KIM H J, RYU C H, KIM H, RYU C

System for growing crystalline material, has optical emission spectrometer (OES) that controls parameter in closed loop and maintains required proposition of plasma constituent for growth of crystalline materials in microwave plasma reactor.

SHARDA T, BHANDARI R, RAJNEESH B, TARUN S

Plasmonic or electronically resonant material used in sensor system for Raman spectrometer, comprises substrate, epitaxial growth layer comprising graphene layer, and interface layer formed between graphene layer and substrate.

ROBINSON J A, BRIGGS N, KNAPPENBERGER K, ZHAO T

Manufacture of graphene-based device used for e.g. gas sensor, involves providing graphene assembly, transferring graphene assembly to substrate, using photolithography and removing UV barrier layer and photoresist layer.

MIGLIORATO M, KUMAR R, MONTEVERDE U

Synthesizing graphene involves annealing substrate in hydrogen gas atmosphere, subsequently undertaking deposition and nucleation step where relatively thick carbon layer is deposited onto substrate, and undertaking graphene growth step.

BOINTON T H, BARNES M D, RUSSO S, CRACIUN M, HARDISTY BOINTON T

Composition for controlled growth of graphene monolayers on a metal oxide surface, comprises a substrate, a metal oxide formed on the substrate, and graphene formed on the metal oxide.

JEFFRY K, KELBER J