国家/地区 台湾（4）
IPC部 C（4）
IPC大类 C01（4） C23（3） H01（3）
G03（2）
IPC小类 C01B（4）
IPC C01B032/184（4）
发明人
公开年 2018（2）
申请年
专利权人 TAIWAN SEMIC.（2）

Photon device for high-speed interconnection in light sub-system, has multiple metal layers set on substrate, photon material layer provided with graphene and set on multiple metal layers, and light routing layer provided with waveguide and set on photon material layer.

ISLAM R, RUSU S, SONG W, ISLAM M R

Production of electronic device such as integrated circuit board, involves providing substrate, supplying flow comprising precursor compound, selectively laser ablating graphene, and selectively laser ablating surface of substrate.

GLASS H, GUINEY I, TYLER M, WALLIS R, BAINES R, THOMAS S

Manufacturing graphene film used for manufacturing pellicle involves coating graphene with protective film, removing base material by wet etching with etching liquid and dissolving protective film using solvent having lower surface tension.

YANASE Y, YANASE M, LIANG L

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C