| 国家/地区 | 中国(7) 日本(2) |
| IPC部 | C(6) H(3) |
| IPC大类 |
C01(5)
H01(3)
C23(2)
C30(2) |
| IPC小类 |
C01B(5)
H01L(3)
C23C(2)
C30B(2) |
| IPC |
C01B031/04(2)
C01B032/186(2)
C23C014/06(2)
C23C016/26(2) |
| 发明人 |
XIE X(8)
|
| 公开年 | 2015(4) 2016(2) 2017(2) |
| 申请年 |
2015(8)
|
| 专利权人 |
SHANGHAI INST MICROSYSTEM INFORMATION(8)
|
DING G, ZHOU C, HE P, XIE X
HE P, ZHOU C, DING G, XIE X
WANG H, TANG S, LU G, WU T, JIANG D, DING G, ZHANG X, XIE H, XIE X, JIANG M
JIANG M, LI L, XIE X, XIE H, WANG H
DENG L, HE L, JIANG M, LI L, XIE X, ZHANG D, XIE H, WANG H, CHEN L
DENG L, HE L, JIANG M, LI L, XIE X, WU T, XIE H, WANG H, CHEN L
DING G, JIANG M, SUN J, XIE X, TIAN S, DING C
HE L, JIANG M, LI L, XIE X, TANG S, ZHANG D, XIE H, WANG H, CHEN L
