| 国家/地区 | 中国(6) |
| IPC部 | C(5) |
| IPC大类 | C01(4) C23(2) |
| IPC小类 | C01B(4) C23C(2) |
| IPC |
C01B031/04(4)
C01B032/186(2)
C23C016/26(2)
|
| 发明人 |
ZHANG M(6)
|
| 公开年 |
2015(6)
|
| 申请年 | 2015(5) |
| 专利权人 |
SHANGHAI INST MICROSYSTEM INFORMATION(6)
|
DI Z, XUE Z, ZHANG M, YE L, DAI J, WANG Z
DI Z, JIA P, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J
DI Z, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J, WANG Z
DI Z, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J, WANG Z
DI Z, WANG G, SHI X, XUE Z, ZHANG M, ZHENG X, DAI J
DI Z, CHEN D, DING G, GUO Q, LI J, LIU X, WANG G, XIE X, ZHANG M, ZHENG X
