国家/地区 美国（6） 韩国（5） 中国（3） 欧洲专利局（EPO）（2）
IPC部 H（5） C（4） B（3）
G（2）
IPC大类 H01（5） C01（4）
IPC小类 C01B（4） H01L（4）
IPC C01B031/04（3） H01L021/02（2） H01L023/532（2）
发明人 LEE C（7）
公开年 2017（6）
申请年 2016（7）
专利权人 SAMSUNG ELEC.（5）

Vacuum degree-measuring sensor consists of graphene nano-ribbon film comprising graphene nano-ribbon layers, and carries out sensing vacuum degree using resistance value of each of graphene nano-ribbon layers.

AHN S, JO H, NO T, KIM D, LEE C, SON J, AHN S I, JO H D, NO T H, KIM D K, LEE C H, SON J H

Photomask pellicle for protecting photomask in exposure process using light including extreme UV (EUV), has nanocrystalline graphene that comprises nanocrystalline crystal grains and grains comprise two dimensional carbon structure.

SHIN H J, SONG H J, PARK S J, SHIN K W, LEE C S, SHIN H, SONG H, PARK S, SHIN K, LEE C

Anti-corrosion composite layer used for protecting metal building materials, comprises anti-corrosion coatings, graphene nanosheets and carrier resins, on substrate in preset order.

WU M Y, HSIEH C, LEE C, CHEN J, HSIEH S, WU Y, XIE C, LI J, XIE S, HSIEH C Y, LEE C H, CHEN J R, HSIEH S L

Hybrid interconnect structure for use in electronic device, has interfacial bonding layer formed between non-metallic material layer and graphene layer or metal and graphene layers, where bonding layer is formed with metallic material.

SHIN K, SHIN H, KIM C, LEE C, PARK S, SONG H

Method for fabricating graphene nano-mesh in e.g. transparent display device, involves forming graphene nano-mesh including openings by etching oxide layer, and transferring graphene nano-mesh onto substrate after removing catalyst layer.

LEE J, KIM Y, LEE C, LEE J H, KIM Y S, LEE C S

Method for patterning graphene holes on substrate during manufacturing display device, involves forming hole patterns spaced apart from each other on graphene layer by irradiating pulse laser while graphene layer is in motion.

LEE J, WOO Y, LEE C, CHO E, LEE J Y, WOO Y S, LEE C S, CHO E H

Multilayer structure for electronic device has diffusion barrier layer between first material layer and second material layer, that includes non-graphene-based two-dimensional (2D) material.

SONG H, NAM S, PARK S, SHIN K, SHIN H, LEE J, LEE C, CHO Y, SONG H J, NAM S G, PARK S J, SHIN K W, SHIN H J, LEE J H, LEE C S, CHO Y C, NA S, ZHAO L