国家/地区 世界知识产权组织（8）
IPC部 C（8）
IPC大类 C23（8） C01（7） H01（5）
B32（2）
IPC小类 C23C（8） C01B（7） H01L（4）
B32B（2）
IPC C23C016/26（8）
发明人 IFUKU R（2） MATSUMOTO T（2） RYOTA I（2）
TAKASHI M（2）
公开年 2020（8）
申请年 2019（7） 
专利权人 TOKYO ELECTR.（2）

Detecting abnormal growth of graphene by preparing inspected object having graphene film formed by chemical vapor deposition on substrate, using dark-field optical system to receive light from film and detecting abnormal growth of graphene.

IFUKU R, MATSUMOTO T, FUJIO A, SAITO K, RYOTA I, TAKASHI M, AKIRA F, KOUSAKU S

Forming graphene structure by preparing to-be-processed substrate, pre-processing by supplying gas containing carbon containing gas to to-be-processed substrate, and forming a graphene structure on surface of to-be-processed substrate.

IFUKU R, MATSUMOTO T, SUGIURA M, RYOTA I, TAKASHI M, MASAHITO S

Production of graphene on metallic substrate for layered composite, involves depositing layer of carbon barrier material on metallic substrate, depositing layer of chemical vapor deposition catalyst and forming graphene on catalyst layer.

SINGH R, PATWARY S, BANERJEE P C

Applying protective graphene coating onto surface, especially onto two or three dimensional artwork or colored surface, involves e.g. depositing graphene onto at least one side supporting substrate to produce graphene/substrate composite.

GALIOTIS C, BAGLIONI P, ANAGNOSTOPOULOS G, PASTORE CARBONE M G, POGGI G, PAPADIMITRIOU K, PATERAKIS G, KOTSIDI M, GORGOLIS G

Producing n-doped graphene films on substrate for e.g., optical device, by coating surface of substrate with doped polymer solution comprising alkali metal salt, polymer, and solvent and contacting graphene layer with coated substrate.

EISAMAN M, FOLKSON J, ANDRADE J

Producing reduced graphene oxide by providing carbon material, providing substrate adjacent to provided carbon material, heating carbon material, and depositing carbonaceous material on substrate.

KIM G H

Forming electronic device i.e. 3-dimentional NAND device involves forming graphene barrier layer on substrate surface and depositing fill layer over barrier layer that prevents diffusion of elements between fill layer and substrate surface.

WU Y, GANDIKOTA S, MALLICK A B, NEMANI S D

Producing graphene-metal composite wire, comprises e.g. growing graphene on surface of metal wire, twisting and compounding obtained wires, pre-tensioning wires, cold drawing, and performing chemical vapor deposition.

CHEN Y, ZHANG T, REN A