国家/地区 |
澳大利亚(9)![]() |
IPC部 |
C(9)![]() |
IPC大类 |
C23(9)
C01(8)
B01(4)
H01(4) B32(3) B82(3) A41(2) G01(2) |
IPC小类 |
C23C(9)
C01B(8)
B32B(3)
B82Y(3) A41D(2) B01D(2) B01J(2) H01L(2) |
IPC |
C23C016/26(9)![]() |
发明人 |
CHOI K(2)
HEIGHT M(2)
PARK H(2)
PARK H G(2) |
公开年 | 2021(4) 2017(3) 2013(2) |
申请年 | 2016(3) 2020(2) 2021(2) |
专利权人 | HEIQ MATERIA.(2) UNIV SOUTHWE.(2) |
CHOI K, PARK H G, HEIGHT M, CHOI K J, PARK H, PIAO H
NING J, FENG X, WANG D, ZHANG J, MU M, HAO Y
PARK H G, HEIGHT M, CHOI K, PARK H
SEO D H, PINEDA S, HAN Z J, OSTRIKOV K
SWETT J L, BEDWORTH P V, HEISE S E, SINTON S W, SIMON S M
MALECKI H C, DAHNE J L, LOEBACH J P, GAIGLER R L, LEDFORD J T, MALECKI H, DAHNE J, LOEBACH J, GAIGLER R, LEDFORD J