国家/地区 美国（4） 中国（3） 欧洲专利局（EPO）（2） 日本（2） 世界知识产权组织（2）
IPC部 C（7）
IPC大类 C23（7） H01（5） C01（3）
C30（2）
IPC小类 C23C（7） C01B（3） H01L（3）
C30B（2） H01J（2）
IPC C23C014/14（7）
发明人 DU S（2） GAO K（2） HE Y（2）
LI N（2） LIN S（2） LIU C（2）
SONG J（2） WANG C（2） YU J（2）
ZHANG D（2）
公开年 2016（3） 2017（3）
申请年 2016（7）
专利权人 LIAONING ADV.（2） SHENYANG INS.（2）

Sensor film, has flexible substrate which is attached to sensor film and composite electrode which comprises first portion that includes metal layer in graphene layer.

AHMED K, MAJHI P

Manufacturing method of semiconductor device, by forming graphene layer on first substrate, transferring graphene layer from first substrate to second substrate, and forming single-crystalline film on graphene layer.

KIM J

Composite used for electrode of transistor used in flexible device, consists of single crystal sapphire substrate having dislocation density less than preset value, metal film grown on substrate, and graphene film grown on metal film.

AOTA N, AIDA H

Depositing graphene-based layer on substrate by chemical vapor deposition using hydrocarbon, comprises forming plasma within vacuum chamber using magnetron containing target made of catalytically active metal, and sputtering.

WALD K, FAHLAND M, GUNTHER S, SCHILLER N, GUENTHER S

Copper substrate for growing graphene monolayer has second copper layer in contact with first copper layer, and has second copper percentage, second oxygen percentage and second average thickness.

YAGER T A, ROBINSON J

Power generation thin film device comprises stainless steel plate, metal electrode, conductive graphene thin film, polyvinylidene fluoride piezoelectric thin film, and another metal electrode, and another conductive graphene thin film.

DU S, GAO K, HE Y, LI N, LIN S, LIU C, WANG C, ZHANG D, YU J, SONG J

Pressing-type power generation thin film device for vehicle, has stainless steel plate, aluminum electrode, electric conduction graphene thin film and PTFE piezoelectric thin film that are arranged in sequence from bottom to upper layer.

DU S, GAO K, HE Y, LI N, LIN S, LIU C, SONG J, WANG C, YU J, ZHANG D