国家/地区 中国（5） 美国（5） 台湾（4） 世界知识产权组织（3） 日本（2）
IPC部 C（9）
IPC大类 C01（9）
IPC小类 C01B（9）
IPC H01J037/32（5） C01B032/194（4） H01J037/20（3）
H01J037/26（3） B82Y040/00（2） C01B032/182（2）
C01B032/184（2） C23C016/26（2） C23C016/54（2）
H01L021/285（2） H01L021/768（2） H01L023/532（2）
发明人 GUO C（2） LIU N（2） LU Y（2）
NI X（2） WANG H（2）
公开年 2022（9）
申请年 2022（5）  2021（4） 
专利权人 APPLIED MATE.（2） SHUIMU BEIJI.（2） UNIV TSINGHU.（2）

Upper electrode assembly used in plasma processing apparatus, has heat transfer sheet that is mounted between electrode plate and metal plate and having vertically oriented portion with vertically oriented graphene structures.

TSUJIMOTO H, KOBUNE T, LI L, LEE L, KOBUNEDAKAKI

Producing photoluminescence material involves placing plastic piece into working solution which is water, applying micro-plasma onto surface of the working solution, and degrading the plastic piece into multiple smaller molecular and graphene quantum dot.

CHIANG W, WENG R, WENG R J

Composite material used for functionalizing carbon structures within plasma reactor, or liquid collection facility, comprises polymer, and graphene-containing material, where composite material has glass transition temperature that is 10% greater than glass transition temperature of polymer.

KC C B, BALDWIN J, HINES M, VANHEUSDEN K, ROGOJINA E, COOK D, LANNING B, ANZELMO B H, STOWELL M W

Depositing graphene layer on substrate in plasma enhanced chemical vapor deposition of graphene at low temperatures, involves providing substrate within modular microwave plasma chamber, and flowing carbon source and hydrogen source into modular microwave plasma chamber.

KRAUS P A, NGUYEN H, MEBARKI B, WANG C, VALENCIA C, CHUA T C

Preparing graphene oxide suitable for electron microscope imaging, involves preparing graphene oxide solution, selecting sheet as graphite material, and sieving, centrifuging, acid washing, alkali washing, organic solvent washing.

SUN Q

Preparing graphene electron microscope carrier net comprises spreading hydrocarbon mixture on surface of the graphene film formed on metal substrate, transferring graphene film to electron microscope carrier net, and cleaning hydrocarbon mixture-graphene film-electron microscope carrier net.

NI X, LU Y, LIU N, GUO C, WANG H

Processing semiconductor by generating plasma of carbon- and hydrogen-containing precursors, forming layer of graphene on substrate, and halting flow of carbon-containing precursor while maintaining plasma with hydrogen-containing precursor.

INGLE N K, MALLICK A B, SINGHA R S, WANG J, ROY S S

Preparing electrically functionalized graphene electron microscope carrier net comprises adopting aromatic diazonium salt with electron-donating group or electron-withdrawing group, laying hydrocarbon mixture on surface of modified graphene film, and transferring to electron microscope carrier grid.

NI X, LIU Y, LU Y, LIU N, RAO Y, GUO C, WANG H

Graphene grid used as cryo-electron microscope grid for structural analysis of target substance e.g. protein, has structure in which functional group is introduced into surface of graphene.

TSUYOSHI I, HARUYASU A, KEI O, KEIICHI N, TAKAYUKI K, FUMIAKI M, JUNSO F, SHOTA K, KUMANO S, FUJITA J, MAKINO F, KATO T, NAMBA K, OHKUBO K, ASAHARA H, INOUE G